DocumentCode

2746412

Title

Performance Evaluation Of Adaptable Manufacturing Systems For Semiconductor IC Production

Author

Wood, S.C. ; Saraswat, K.C.

Author_Institution

Stanford University

fYear

1993

fDate

17-19 May 1993

Firstpage

133

Lastpage

134

fLanguage

English

Publisher

ieee

Conference_Titel

VLSI Technology, 1993. Digest of Technical Papers. 1993 Symposium on

Conference_Location

Kyoto, Japan

Type

conf

DOI

10.1109/VLSIT.1993.760284

Filename

760284