DocumentCode

2746476

Title

Nitride-Clad LOCOS Isolation For 0.25/spl mu/m CMOS

Author

Pfiester, J.R. ; Kenkare, P.U. ; Subrahmanyan, R. ; Lin, J.-H. ; Crabtree, P.

Author_Institution

Motorola Inc.,

fYear

1993

fDate

17-19 May 1993

Firstpage

139

Lastpage

140

fLanguage

English

Publisher

ieee

Conference_Titel

VLSI Technology, 1993. Digest of Technical Papers. 1993 Symposium on

Conference_Location

Kyoto, Japan

Type

conf

DOI

10.1109/VLSIT.1993.760287

Filename

760287