مرکز منطقه ای اطلاع رساني علوم و فناوري - Nitride-Clad LOCOS Isolation For 0.25/spl mu/m CMOS

DocumentCode :

2746476

Title :

Nitride-Clad LOCOS Isolation For 0.25/spl mu/m CMOS

Author :

Pfiester, J.R. ; Kenkare, P.U. ; Subrahmanyan, R. ; Lin, J.-H. ; Crabtree, P.

Author_Institution :

Motorola Inc.,

fYear :

1993

fDate :

17-19 May 1993

Firstpage :

139

Lastpage :

140

fLanguage :

English

Publisher :

ieee

Conference_Titel :

VLSI Technology, 1993. Digest of Technical Papers. 1993 Symposium on

Conference_Location :

Kyoto, Japan

Type :

conf

DOI :

10.1109/VLSIT.1993.760287

Filename :

760287

Link To Document :