An Integrated Isolation/Gate Process For Sub-quarter Micron Technologies

Author

Kangar ; Hillenius ; Baker, M.R. ; Nakahara, S. ; Chang, C.P. ; Chong-Cheng Fu ; Fritzinger, L.B. ; Giniecki, L.

Author_Institution

AT&T Bell Laboratories

fYear

1993

fDate

17-19 May 1993

Firstpage

141

Lastpage

142

fLanguage

English

Publisher

ieee

Conference_Titel

VLSI Technology, 1993. Digest of Technical Papers. 1993 Symposium on

Conference_Location

Kyoto, Japan

Type

DOI

10.1109/VLSIT.1993.760288

Filename

760288

Link To Document