مرکز منطقه ای اطلاع رساني علوم و فناوري - SPIRIT - A Bipolar/BiCMOS Isolation Technology For High-Performance VLSI

DocumentCode :

2746505

Title :

SPIRIT - A Bipolar/BiCMOS Isolation Technology For High-Performance VLSI

Author :

Burghartz, J.N. ; Cifuentes, A.O. ; Warnock, J. ; McIntosh, R.C. ; Stanis, C.L. ; Cressler, J.D. ; Sun, J.Y.-C. ; Comfort, J.H. ; Jenskins

Author_Institution :

IBM Semiconductor Research and Development Center

fYear :

1993

fDate :

17-19 May 1993

Firstpage :

143

Lastpage :

144

fLanguage :

English

Publisher :

ieee

Conference_Titel :

VLSI Technology, 1993. Digest of Technical Papers. 1993 Symposium on

Conference_Location :

Kyoto, Japan

Type :

conf

DOI :

10.1109/VLSIT.1993.760289

Filename :

760289

Link To Document :