Processing and modelling of micromachined cantilever valves

We have fabricated and simulated micromachined cantilever valves. For processing, bulk micromachining and silicon fusion bonding of a duct-containing-wafer and a flap-containing-wafer are used. After the release of the cantilever with buffered HF a rinse in toluene avoids sticking. Measurements revealed a good forward to reverse flow rate ratio, where leakage rates were below 1 μl min^-1. Static simulations were done by coupling mechanical (ANSYS) and fluidic (FLOWSD) simulators. The modelling results were in good agreement with measured results and give confidence in this simulator. Dynamic simulations were realized with an impact model of the cantilever sitting on top of the duct. A lumped system was used together with measured results of the resonance frequency and the quality factor of a cantilever in water