Title :
Advanced materials techniques for large HgCdTe focal plane arrays
Author :
Tennant, W.E. ; Kozlowski, L.J. ; Bubulac, L.O. ; Gertner, E.R. ; Vural, K.
Author_Institution :
Rockwell International Sci. Center, Dallas, TX, USA
Abstract :
The advent of advanced materials techniques (MOCVD and MBE) for growing HgCdTe on alternative substrates has opened new avenues for IR system development. 128×128 and 256×256 SWIR staring arrays of HgCdTe grown on sapphire substrates offer highly sensitive viewing of distant astronomical objects. Similar sized HgCdTe/sapphire MWIR arrays at 77 K have shown in-lab noise equivalent temperature differences <0.02 K and excellent operability and uniformity. LWIR diodes formed by ion-implantation in HgCdTe on either GaAs or Si substrates show performance comparable at 77 K to devices made in HgCdTe grown on more common II-VI substrates. This suggests that substrate producibility limits. The authors discuss the following topics: basic alternative-substrate HgCdTe materials and device architectures for SWIR, MWIR, and LWIR; description of SWIR and MWIR imaging arrays; LWIR results; and implications for future IR FPAs
Keywords :
II-VI semiconductors; III-V semiconductors; cadmium compounds; elemental semiconductors; gallium arsenide; image sensors; infrared detectors; mercury compounds; semiconductor technology; silicon; substrates; 128 pixel; 16384 pixel; 256 pixel; 65536 pixel; 77 K; GaAs; HgCdTe-GaAs; HgCdTe-Si; IR system; LWIR diodes; MBE; MOCVD; MWIR arrays; SWIR staring arrays; Si; focal plane arrays; ion-implantation; sapphire substrates;
Conference_Titel :
Advanced Infrared Detectors and Systems, 1990., Fourth International Conference on
Conference_Location :
London
Print_ISBN :
0-86341-702-7