Title :
Monolithic infrared sensor arrays with 3-12 μm cut-off in heteroepitaxial narrow gap lead chalcogenides on silicon substrates
Author :
Zogg, H. ; Maissen, C. ; Masek, J. ; Blunier, S.
Author_Institution :
AFIF, Swiss Federal Inst. of Technol., Zurich, Switzerland
Abstract :
The authors describe heteroepitaxy of narrow gap semiconductor (NGS) layers on Si-substrates, and fabrication of photovoltaic IR=sensor arrays in the NGS layers. They use lead chalcogenides (PbS, PbTe, Pb1-xEuxSe and Pb1-xSnxSe) as NGS material for sensor integration. The high permittivity of lead salts yields much more fault tolerant devices due to the effective shielding of charges resulting from defects. Epitaxy of the NGS layers is achieved by using stacked intermediate CaF2-BaF2 bilayers to overcome the large lattice and thermal expansion mismatch. The authors have fabricated linear sensor arrays on Si-substrates with cut-off wavelengths ranging from 3 μm (with PbS and Pb1-xEuxSe) and 5.5 μm (PbTe) up to >12 μm (Pb1-xSnxSe). The sensitivities of the best PbTe Si sensors are as high as those of MCT with comparable cut-off wavelengths
Keywords :
IV-VI semiconductors; chalcogenide glasses; infrared detectors; integrated circuit technology; lead compounds; p-n heterojunctions; semiconductor epitaxial layers; semiconductor technology; 3 to 12 micron; CaF2-BaF2 bilayers; IV-VI semiconductors; Pb1-xEuxSe-Si; Pb1-xSnxSe-Si; PbS-Si; PbTe-Si; Si; fault tolerant devices; heteroepitaxial narrow gap lead chalcogenides; infrared sensor arrays; linear sensor arrays; narrow gap semiconductor; permittivity; photovoltaic IR=sensor; shielding;
Conference_Titel :
Advanced Infrared Detectors and Systems, 1990., Fourth International Conference on
Conference_Location :
London
Print_ISBN :
0-86341-702-7