Displacement sensor for detecting sub-micrometer motion

This paper describes a design of a displacement sensor that detects motion of a platform by measuring change in capacitance due to the fringing electric field. Several variations of the sensor´s design were simulated to establish performance sensitivity and the simulation results are presented. Proof of concept testing was performed and encouraging outcomes were recorded. The sensor was able to detect motion of a platform with resolution of 100 nm or better at the distance of several micrometers.