Title :
Features and applications of various TFTs - Si based matured TFTs and oxide semiconductor based transparent TFTs
Author_Institution :
Dept. of Electron. & Inf., Ryukoku Univ., Otsu, Japan
Abstract :
Thin-film transistors (TFTs) are key devices for high image quality information displays. Features and applications of various TFTs, such as matured amorphous and poly-Si TFTs and transparent poly-ZnO and amorphous InGaZnO TFTs, are discussed.
Keywords :
III-V semiconductors; amorphous semiconductors; flexible displays; indium compounds; silicon; thin film transistors; zinc compounds; InGaZnO; Si; image quality information displays; matured TFT; matured amorphous silicon; oxide semiconductor; poly-Si TFT; thin film transistors; Annealing; Educational institutions; Films; Grain boundaries; Insulators; Thin film transistors; Zinc oxide; amorphous InGaZnO; amorphous-Si; information display; poly-Si; poly-ZnO; thin-film transistor (TFT); transparent;
Conference_Titel :
Photonics Conference (PHO), 2011 IEEE
Conference_Location :
Arlington, VA
Print_ISBN :
978-1-4244-8940-4
DOI :
10.1109/PHO.2011.6110669
