• DocumentCode
    2750857
  • Title

    Direct Drive Rotary Servomotor for Semiconductor Applications

  • Author

    Yuan-Jiang, Liu ; Qixin, Zhu ; Yan, Ho Siu ; Widdowson, Gary P.

  • Author_Institution
    ASM Assembly Autom. Ltd, Hong Kong
  • fYear
    2006
  • fDate
    3-5 July 2006
  • Firstpage
    94
  • Lastpage
    97
  • Abstract
    This paper describes the design methodology for a direct drive rotary servo system. The optimisation and coupling between the thermal, mechanical and electromagnetic properties are investigated. The simulated and experimental results are in close agreement. The motion performance is also presented
  • Keywords
    couplings; electromagnetic coupling; mechanical properties; motor drives; rotors; servomotors; thermal properties; direct drive rotary servomotor; electromagnetic property; mechanical property; semiconductor applications; thermal property; Design engineering; Design methodology; Electromagnetic coupling; Hysteresis motors; Magnetic analysis; Magnetostatics; Reluctance motors; Servomechanisms; Servomotors; Torque;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Mechatronics, 2006 IEEE International Conference on
  • Conference_Location
    Budapest
  • Print_ISBN
    0-7803-9712-6
  • Electronic_ISBN
    0-7803-9713-4
  • Type

    conf

  • DOI
    10.1109/ICMECH.2006.252504
  • Filename
    4018339
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2750857