Title :
Proceedings. IEEE Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots (Cat. No.91CH2957-9)
Abstract :
The following topics are dealt with: microactuators; novel technologies; micromachining; material properties and simulation; actuators for miniature robots and bulk micromachining; optics and positioning; and medical applications and fluidics
Keywords :
electric actuators; electric sensing devices; micromechanical devices; robots; semiconductor technology; small electric machines; fluidics; material properties; medical applications; microactuators; micromachining; miniature robots; optics; positioning;
Conference_Titel :
Micro Electro Mechanical Systems, 1991, MEMS '91, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. IEEE
Conference_Location :
Nara, Japan
Print_ISBN :
0-87942-641-1
DOI :
10.1109/MEMSYS.1991.114777
