Design Considerations for a Modular High Precision 3D Coordinate Measuring Machine

Author

Hermann, Gyula

Author_Institution

BrainWare Ltd., Budapest

fYear

2006

fDate

3-5 July 2006

Firstpage

161

Lastpage

165

Abstract

The appearance of micro electromechanical elements increased demand can be observed for 3D coordinate measuring having submicron measuring uncertainty. The paper gives an overview of various designs and describes the construction of a small (100times100times100 mm) high precision (0.01 mum resolution, less then 0.1 mum measuring uncertainty over the full range) coordinate measuring machine. It has a novel motion system where both coarse and fine positioning is realized by the same control system based on piezo-motor. The construction enables the application of various probes. The coordinate measuring machine was developed as part of a research project

Keywords

coordinate measuring machines; measurement uncertainty; micromechanical devices; motion control; position control; precision engineering; control system; coordinate measuring machine; measuring uncertainty; micro electromechanical elements; piezomotor; Capacitance; Coordinate measuring machines; Distortion measurement; Machining; Magnetic levitation; Manufacturing; Measurement uncertainty; Metrology; Scanning probe microscopy; Volume measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Mechatronics, 2006 IEEE International Conference on

Conference_Location

Budapest

Print_ISBN

0-7803-9712-6

Electronic_ISBN

0-7803-9713-4

Type

conf

DOI

10.1109/ICMECH.2006.252516

Filename

4018351