Investigation and analysis of a MOEMS gyroscope based on novel resonator

In this paper, a micro-optical-electro-mechanical system (MOEMS) gyroscope was developed taking a new optical microcavity - planar microdisk cavity as the core sensing element. The planar microdisk cavity was designed with high Q value and small volume, and the processing technology of the planar microdisk cavity was discussed in detail with the micro-nano machining process technology. To obtain resonance curve, a resonant cavity proof-of-principle experiment was performed. As the light source and planar microdisk cavity dimensions have a decisive influence on the Q value of microcavity and angular rate measurement limit of gyroscope, a method was discussed that using traditional F-P cavity resonance curve for optimization of planar microdisk cavity geometric parameters.