Title :
A Monitoring System of GaN Growth Process
Author :
Wang, Jian ; Li, Dan ; Che, Renwei
Author_Institution :
Sch. of Electron & Inf. Eng. ,, Dalian Univ. of Technol.
Abstract :
A monitoring system of GaN growth process is introduced. Data acquisition modules, main temperature-controller and flowmeters are connected with standard RS-485 bus to compose the RS-485 network. Gas flow rates are set by the output voltage of D/A board. Vacuometers and assistant temperature-controller are connected with serial ports. Acquisition, displaying, controlling, setting, alarming, and printing of variables in the process are implemented in system program
Keywords :
III-V semiconductors; computerised monitoring; data acquisition; flowmeters; gallium compounds; semiconductor growth; temperature control; D/A board; GaN; GaN growth process; RS-485 bus; RS-485 network; data acquisition modules; flowmeters; gas flow rates; long distance communication; monitoring system; serial ports; temperature-controller; vacuometers; Communication system control; Control systems; Data acquisition; Electrons; Fluid flow; Gallium nitride; Intelligent control; Monitoring; Printing; Voltage; RS-485 bus; data acquisition; long distance communication;
Conference_Titel :
Intelligent Control and Automation, 2006. WCICA 2006. The Sixth World Congress on
Conference_Location :
Dalian
Print_ISBN :
1-4244-0332-4
DOI :
10.1109/WCICA.2006.1714095
