Friction and wear studies on lubricants and materials applicable to MEMS

Author

Suzuki, Shigehisa ; Matsuura, Tsukasa ; Uchizawa, Manabu ; Yura, Shinsuke ; Shibata, Hirosh ; Fujita, Hiroyuki

Author_Institution

Mitsubishi Electr. Corp., Hyogo, Japan

fYear

1991

fDate

30 Jan-2 Feb 1991

Firstpage

143

Lastpage

147

Abstract

A simple method is proposed to evaluate the friction and wear of thin films which can be applied as lubricants to moving surfaces in MEMS (microelectromechanical systems). Thin films of solid and liquid were studied. Large friction coefficient and large wear rate are observed for an SiN/polysilicon combination. Large friction coefficient and slight wear were observed for an SiN/SiN combination. DLC (diamond-like carbon) has a low friction coefficient of 0.2~0.3 with SiN and polysilicon. It is shown that a DLC film and a liquid lubricant film are very effective in reducing friction and wear at the SiN/polysilicon interface

Keywords

friction; micromechanical devices; semiconductor-insulator boundaries; silicon; silicon compounds; wear testing; DLC film; MEMS; SiN-Si; SiN-SiN; diamond-like carbon; friction; friction coefficient; lubricants; microelectromechanical systems; wear rate; wear studies; Equations; Friction; Lubricants; Magnetic films; Micromechanical devices; Micromotors; Silicon compounds; Solids; Stators; Transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1991, MEMS '91, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. IEEE

Conference_Location

Nara

Print_ISBN

0-87942-641-1

Type

conf

DOI

10.1109/MEMSYS.1991.114785

Filename

114785