DocumentCode
2753318
Title
High-Q shallow etch silicon micro resonators for optical delay
Author
Adams, Donald ; Madejski, Greg ; Preble, Stefan
Author_Institution
Rochester Inst. of Technol., Rochester, NY, USA
fYear
2011
fDate
9-13 Oct. 2011
Firstpage
871
Lastpage
872
Abstract
Low loss shallow etched rib waveguides are systematically analyzed and used to realize compact ring resonators (~100 micron radius) with intrinsic Q-factors of Q~500,000. These high-Q rings directly enable large tunable delays.
Keywords
elemental semiconductors; etching; micro-optics; optical delay lines; optical fabrication; optical resonators; optical waveguides; rib waveguides; silicon; Si; compact ring resonators; high Q shallow etch silicon microresonator; optical delay; rib waveguides; tunable delay; Couplings; Delay; Optical losses; Optical ring resonators; Optical waveguides; Q factor; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Photonics Conference (PHO), 2011 IEEE
Conference_Location
Arlington, VA
Print_ISBN
978-1-4244-8940-4
Type
conf
DOI
10.1109/PHO.2011.6110835
Filename
6110835
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