The LIGA technique-A novel concept for microstructures and the combination with Si-technologies by injection molding

Author

Menz, W. ; Bacher, W. ; Harmening, M. ; Michel, A.

Author_Institution

Inst. fuer Mikrostrukturtech., Kernforschungszentrum Karlsruhe, Germany

fYear

1991

fDate

30 Jan-2 Feb 1991

Firstpage

69

Lastpage

73

Abstract

The LIGA technique originally developed to fabricate separation nozzles for the enrichment of uranium has been expanded into a universal technology for the fabrication of microstructures with high aspect ratio and free lateral shaping. The LIGA process consists of three basic process steps: deep-etch lithography by means of synchrotron radiation, electroforming, and plastic molding. The choice of materials ranges from plastics (PMMA, POM, PA) to metals (up to now Au, Ni, Cu) and ceramics (ZrO₂). These microstructures can be mass-produced by inexpensive injection molding and reaction injection molding processes. Integration with Si technology/int is possible, opening up the potential of novel applications and improving both overall yield and package density

Keywords

X-ray lithography; electroforming; semiconductor technology; synchrotron radiation; Au; Cu; LIGA technique; Ni; Si technology/int; ZrO₂; aspect ratio; ceramics; deep-etch lithography; electroforming; injection molding; lateral shaping; metals; microstructures; package density; plastics; synchrotron radiation; Ceramics; Fabrication; Gold; Injection molding; Inorganic materials; Lithography; Microstructure; Packaging; Plastics; Synchrotron radiation;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1991, MEMS '91, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. IEEE

Conference_Location

Nara

Print_ISBN

0-87942-641-1

Type

conf

DOI

10.1109/MEMSYS.1991.114771

Filename

114771