Study on deposition of amorphous DLC films for CO2 laser by RF-PECVD

Author

Tang, Ji-long ; Liu, Guo-jun ; Fu, Xiu-hua ; Wang, Jing

Author_Institution

Changchun Univ. of Sci. & Technol., Changchun, China

fYear

2010

fDate

July 28 2010-Aug. 1 2010

Firstpage

120

Lastpage

124

Abstract

The CO₂ laser is widely used in material processing and military field for its high output power. So a high damage threshold is especially necessary for the component of the CO₂ laser system. This paper aims to design and prepare the anti-reflective films for 10.6μm, and research the influence of mechanical properties and microstructure of thin films (DLC and Ge) synthesized by RF-PECVD. The effect of deposition parameters on the structure and properties of thin films is studied. The films deposited are studied by AFM, Raman and FTIR. The test results show transmittance of deposited anti-reflective films at 10.6μm is higher than 82%, which is close to theory value. The films have high damage threshold (12.6W). The results reveal that the coating is suitable for CO₂ laser optics system.

Keywords

Fourier transform spectra; Raman spectra; amorphous state; antireflection coatings; atomic force microscopy; diamond-like carbon; infrared spectra; optical films; plasma CVD; thin films; AFM; C; CO₂; CO₂ laser; FTIR spectra; RF-PECVD; Raman spectra; amorphous DLC films; antireflective films; coating; damage threshold; mechanical properties; microstructure; transmittance; Diamond-like carbon; Films; Plasmas; Pump lasers; Refractive index; Surface morphology; Surface treatment; CO2 laser; DLC film; RF-PECVD; threshold;

fLanguage

English

Publisher

ieee

Conference_Titel

Laser Physics and Laser Technologies (RCSLPLT) and 2010 Academic Symposium on Optoelectronics Technology (ASOT), 2010 10th Russian-Chinese Symposium on

Conference_Location

Harbin

Print_ISBN

978-1-4244-5511-9

Type

conf

DOI

10.1109/RCSLPLT.2010.5615381

Filename

5615381