Title :
Growth and applications of piezoelectric and ferroelectric thin films
Author :
Shiosaki, Tadashi
Author_Institution :
Dept. of Electron., Kyoto Univ., Japan
Abstract :
The importance of polar-axis-oriented films and epitaxial films of polar crystals in piezoelectric, pyroelectric, optical, and ferroelectric applications is emphasized. The applications of these films of polar crystals are reviewed. The recent development of an acoustooptic deflector made of ZnO thin-film optics and Si Schottky diode photodetectors integrated on a Si substrate is described. The growth of ferroelectric films by reactive magnetron sputtering and photo MOCVD and their properties related to ferroelectric memory applications are described
Keywords :
acousto-optical devices; chemical vapour deposition; epitaxial layers; ferroelectric storage; ferroelectric thin films; integrated optics; optical deflectors; photodetectors; piezoelectric semiconductors; piezoelectric thin films; sputter deposition; vapour phase epitaxial growth; II-VI semiconductor; PZT; PbTiO3; PbZrO3TiO3; Schottky diode photodetectors; Si photodetectors; Si substrate; ZnO film; acoustooptic deflector; elemental semiconductor; epitaxial films; ferroelectric memory; ferroelectric thin films; monolithic integration; photo MOCVD; piezoelectric thin films; polar-axis-oriented films; reactive magnetron sputtering; Crystals; Ferroelectric films; Ferroelectric materials; Integrated optics; Optical films; Piezoelectric films; Pyroelectricity; Semiconductor thin films; Sputtering; Zinc oxide;
Conference_Titel :
Ultrasonics Symposium, 1990. Proceedings., IEEE 1990
Conference_Location :
Honolulu, HI
DOI :
10.1109/ULTSYM.1990.171422
