DocumentCode

2754602

Title

Silicon bulk micromachining

Author

Esashi, Masayoshi ; Haga, Yoichi

Author_Institution

Tohoku University

fYear

2000

fDate

2000

Firstpage

7

Lastpage

12

Keywords

Assembly; Catheters; Circuits; Coils; Communication system control; Etching; Micromachining; Optical fiber sensors; Optical fibers; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Microtechnologies in Medicine and Biology, 1st Annual International, Conference On. 2000

Print_ISBN

0-7803-6603-4

Type

conf

DOI

10.1109/MMB.2000.893730

Filename

893730