Title :
Lateral DC contact RF MEMS switch with fine gap combs
Author :
Kang, Sungchan ; Kim, Hyeon Cheol ; Chun, Kukjin
Author_Institution :
Seoul Nat. Univ., Seoul
fDate :
Oct. 30 2007-Nov. 2 2007
Abstract :
We developed lateral DC contact RF MEMS switch using combs. Our goal was to fabricate RF MEMS switch with high reliability and good RF characteristics for FEM module in wireless transceiver system. Therefore, we used silicon substrate for combs in order to achieve big contact force, small off-state capacitance, and high reliability. As a result, our switch showed insertion loss less than 0.44 dB at 2 GHz, isolation greater than 60 dB, and low actuation voltage at 26 V.
Keywords :
microswitches; reliability; transceivers; FEM module; RF MEMS switch; insertion loss; lateral DC contact; reliability; wireless transceiver; Capacitance; Contacts; Electrostatics; Radio frequency; Radiofrequency microelectromechanical systems; Silicon; Switches; Teeth; Transceivers; Voltage;
Conference_Titel :
TENCON 2007 - 2007 IEEE Region 10 Conference
Conference_Location :
Taipei
Print_ISBN :
978-1-4244-1272-3
Electronic_ISBN :
978-1-4244-1272-3
DOI :
10.1109/TENCON.2007.4429090
