Title :
Factory automated system for VLSI manufacturing
Author :
Komiya, Hiroyoshi ; Yamazaki, Masatoshi
Author_Institution :
Mitsubishi Electr. Corp., Itami, Japan
Abstract :
The authors describe some specific features of VLSI manufacturing and concepts for factory automated systems for large-volume mass production and for large-variety production. An automated system for a pilot line in a laboratory and future trends are also discussed
Keywords :
VLSI; factory automation; integrated circuit manufacture; production control; IC fabrication; VLSI manufacturing; factory automated systems; large-variety production; large-volume mass production; pilot line; Application specific integrated circuits; Flow production systems; Laboratories; Manufacturing automation; Mass production; Production facilities; Production systems; Pulp manufacturing; Semiconductor device manufacture; Very large scale integration;
Conference_Titel :
Electronic Manufacturing Technology Symposium, 1989, Proceedings. Japan IEMT Symposium, Sixth IEEE/CHMT International
Conference_Location :
Nara
DOI :
10.1109/IEMTS.1989.76098
