DocumentCode
2755737
Title
Factory automated system for VLSI manufacturing
Author
Komiya, Hiroyoshi ; Yamazaki, Masatoshi
Author_Institution
Mitsubishi Electr. Corp., Itami, Japan
fYear
1989
fDate
26-28 Apr 1989
Firstpage
14
Lastpage
15
Abstract
The authors describe some specific features of VLSI manufacturing and concepts for factory automated systems for large-volume mass production and for large-variety production. An automated system for a pilot line in a laboratory and future trends are also discussed
Keywords
VLSI; factory automation; integrated circuit manufacture; production control; IC fabrication; VLSI manufacturing; factory automated systems; large-variety production; large-volume mass production; pilot line; Application specific integrated circuits; Flow production systems; Laboratories; Manufacturing automation; Mass production; Production facilities; Production systems; Pulp manufacturing; Semiconductor device manufacture; Very large scale integration;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronic Manufacturing Technology Symposium, 1989, Proceedings. Japan IEMT Symposium, Sixth IEEE/CHMT International
Conference_Location
Nara
Type
conf
DOI
10.1109/IEMTS.1989.76098
Filename
76098
Link To Document