Title :
A piezo-electric pump driven by a flexural progressive wave
Author :
Miyazaki, Shun-ichi ; Kawai, Takashi ; Araragi, Muneki
Author_Institution :
Yokogawa Electr. Corp., Tokyo, Japan
fDate :
30 Jan-2 Feb 1991
Abstract :
An effort was made to confirm the possibility of pumping fluids by flexural progressive waves on a thin pipe. A piezoelectric ceramic plate whose composition changes periodically can generate a flexural progressive wave when two sinusoidal voltages (V0 sin ω t and V0 cos ω t) are applied. A thin metal pipe that has been flattened is bonded to an FGM piezoelectric ceramic plate. Both ends of the pipe are closed and two glass pipes are joined perpendicularly to the metal pipe. The pipes are then filled with purified water. When a flexural progressive wave is excited on the plate, pressure is generated between the glass pipes. The pressure is about 10 mm H2O. When the phase difference between the two sinusoidal voltages is changed by 180°, the pressure difference is inverted. The size of the plate is 230×50×0.6 mm3, the diameter of the metal pipe is 1.4 mm, the thickness of the wall is 18 μm, and the pipe is flattened to 300 μm
Keywords :
ceramics; piezoelectric devices; pumps; FGM piezoelectric ceramic plate; flexural progressive wave; piezo-electric pump; piezoelectric ceramic plate; pressure difference; sinusoidal voltages; Bonding; Ceramics; Fabrication; Fluid flow control; Glass; Instruments; Micromotors; Pumps; Research and development; Voltage;
Conference_Titel :
Micro Electro Mechanical Systems, 1991, MEMS '91, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. IEEE
Conference_Location :
Nara
Print_ISBN :
0-87942-641-1
DOI :
10.1109/MEMSYS.1991.114811