Title :
Modeling and analysis of Liga structural micromachinined inductors on CMOS/BiCMOS substrate
Author :
Yu, Xiaoyang ; Klymyshyn, David M.
Author_Institution :
TRLabs, Saskatchewan Univ., Saskatoon, Sask.
Abstract :
Modeling and simulation results for two types of 150 mum height air suspended inductors proposed for LIGA fabrication are presented. The inductor substrates used model the TSMC 0.18 mum CMOS/BiCMOS substrates. The RF performance between the suspended structure and the unsuspended counterpart are compared and the advantage of the suspended structures is explored. At 9.5 GHz, a suspended solenoid inductor can achieve a Q factor of 76 with an inductance of 1.66 nH on a simulated TSMC 0.18 mum BiCMOS substrate, demonstrating the potential of LIGA for fabricating high suspended inductors with good performance and for combining these with CMOS/BiCMOS
Keywords :
BiCMOS integrated circuits; CMOS integrated circuits; LIGA; Q-factor; inductors; micromachining; micromechanical devices; solenoids; 9.5 GHz; BiCMOS substrate; CMOS; LIGA fabrication; TSMC; air suspended solenoid inductor; micromachined inductors; BiCMOS integrated circuits; CMOS process; CMOS technology; Fabrication; Inductors; Microwave devices; Radiofrequency integrated circuits; Semiconductor device modeling; Solenoids; Spirals;
Conference_Titel :
Electrical and Computer Engineering, 2005. Canadian Conference on
Conference_Location :
Saskatoon, Sask.
Print_ISBN :
0-7803-8885-2
DOI :
10.1109/CCECE.2005.1556961
