Modeling and analysis of Liga structural micromachinined inductors on CMOS/BiCMOS substrate

Author

Yu, Xiaoyang ; Klymyshyn, David M.

Author_Institution

TRLabs, Saskatchewan Univ., Saskatoon, Sask.

fYear

2005

fDate

1-4 May 2005

Firstpage

421

Lastpage

424

Abstract

Modeling and simulation results for two types of 150 mum height air suspended inductors proposed for LIGA fabrication are presented. The inductor substrates used model the TSMC 0.18 mum CMOS/BiCMOS substrates. The RF performance between the suspended structure and the unsuspended counterpart are compared and the advantage of the suspended structures is explored. At 9.5 GHz, a suspended solenoid inductor can achieve a Q factor of 76 with an inductance of 1.66 nH on a simulated TSMC 0.18 mum BiCMOS substrate, demonstrating the potential of LIGA for fabricating high suspended inductors with good performance and for combining these with CMOS/BiCMOS

Keywords

BiCMOS integrated circuits; CMOS integrated circuits; LIGA; Q-factor; inductors; micromachining; micromechanical devices; solenoids; 9.5 GHz; BiCMOS substrate; CMOS; LIGA fabrication; TSMC; air suspended solenoid inductor; micromachined inductors; BiCMOS integrated circuits; CMOS process; CMOS technology; Fabrication; Inductors; Microwave devices; Radiofrequency integrated circuits; Semiconductor device modeling; Solenoids; Spirals;

fLanguage

English

Publisher

ieee

Conference_Titel

Electrical and Computer Engineering, 2005. Canadian Conference on

Conference_Location

Saskatoon, Sask.

ISSN

0840-7789

Print_ISBN

0-7803-8885-2

Type

conf

DOI

10.1109/CCECE.2005.1556961

Filename

1556961