DocumentCode
2757827
Title
Comparaitve Economic Analysis Of Mcm-d Fabrication Costs
Author
Garrou, P. ; Heistand, R. ; Frye, D. ; Carr, J. ; Burdcaux, D.
fYear
1993
fDate
9-11 Jun 1993
Firstpage
137
Lastpage
140
Keywords
Ceramics; Chemical processes; Costs; Dielectric materials; Dielectric substrates; Dielectric thin films; Fabrication; Semiconductor device modeling; Sputtering; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronic Manufacturing Technology Symposium, 1993., Proceedings of 1993 Japan International
Print_ISBN
0-7803-1432-8
Type
conf
DOI
10.1109/IEMT.1993.639735
Filename
639735
Link To Document