Title :
A novel MMI-MI SOI temperature sensor
Author :
Tsao, Shyh-Lin ; Peng, Peng-Chun ; Lee, Shin-Ge
Author_Institution :
Dept. of Electr. Eng., Yuan-Ze Inst. of Technol., Chungli, Taiwan
Abstract :
We further develop a novel multimode-interference Michelson interferometer (MMI-MI) temperature sensor based on integrated optics technology. The sensor is made of a multimode interference coupler for achieving a Michelson interferometer (MI) sensor on a silicon-on-insulator (SOI) wafer. SOI technology shows great potential for monolithic complementary metal-oxide semiconductor (CMOS) high-speed opto-electronic devices. The MMI-MI SOI temperature sensor we designed can also reduce the sensor size and be embedded in a monolithic integrated opto-electronic circuit
Keywords :
CMOS integrated circuits; Michelson interferometers; integrated optics; integrated optoelectronics; optical couplers; optical sensors; silicon-on-insulator; temperature sensors; CMOS high-speed opto-electronic devices; MMI-MI SOI temperature sensor; Michelson interferometer sensor; SOI technology; integrated optics technology; monolithic complementary metal-oxide semiconductor; monolithic integrated opto-electronic circuit; multimode interference coupler; multimode-interference Michelson interferometer temperature sensor; sensor size; silicon-on-insulator wafer; CMOS technology; Coupling circuits; Integrated circuit technology; Integrated optics; Interference; MOS devices; Optical interferometry; Optoelectronic devices; Silicon on insulator technology; Temperature sensors;
Conference_Titel :
Lasers and Electro-Optics Society 2000 Annual Meeting. LEOS 2000. 13th Annual Meeting. IEEE
Conference_Location :
Rio Grande
Print_ISBN :
0-7803-5947-X
DOI :
10.1109/LEOS.2000.893915
