Title :
Hermetic Sealing Method For High-speed Mcms
Author :
Handa, Tohru ; Iida, Saburo ; Utsunomiya, Jiro ; Sawano, Masayuki
Keywords :
Ceramics; Conductive films; Dielectric substrates; Firing; Gold; Guidelines; Hermetic seals; Materials reliability; Sealing materials; Thick films;
Conference_Titel :
Electronic Manufacturing Technology Symposium, 1993., Proceedings of 1993 Japan International
Print_ISBN :
0-7803-1432-8
DOI :
10.1109/IEMT.1993.639737
