• DocumentCode
    2758523
  • Title

    A novel silicon electro-optic device for sensor applications

  • Author

    LeMinh, P. ; Akil, N. ; Walling, H. ; Woerlee, P.H. ; van den Berg, A. ; Holleman, Jeremy

  • Author_Institution
    MESA Res. Inst., Twente Univ., Enschede, Netherlands
  • Volume
    2
  • fYear
    2000
  • fDate
    2000
  • Firstpage
    523
  • Abstract
    Though R. Newman reported the avalanche breakdown light emission in a conventional p-n junction diode half a century ago, there are almost no successful applications of this phenomenon in industry. We report the realization of a novel silicon electro-optic device, explicitly the integration of light emitting diode antifuse and photodetector on a single silicon wafer by CMOS technology, and the first important results. The diode antifuse (called antifuse to the rest of this contribution) resembles a conventional diode but has a small size of a few tens of nanometers, which permits easy collection of all emitted photons
  • Keywords
    avalanche breakdown; electro-optical devices; elemental semiconductors; integrated optics; light emitting diodes; optical fabrication; optical sensors; photodetectors; silicon; CMOS technology; Si; Si electro-optic device; avalanche breakdown light emission; conventional diode; conventional p-n junction diode; diode antifuse; emitted photons; industry; light emitting diode antifuse; photodetector; sensor applications; single Si wafer; Detectors; Electrooptic devices; Microwave integrated circuits; Optoelectronic and photonic sensors; Petroleum; Resists; Silicon; Standards development; Transistors; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Society 2000 Annual Meeting. LEOS 2000. 13th Annual Meeting. IEEE
  • Conference_Location
    Rio Grande
  • ISSN
    1092-8081
  • Print_ISBN
    0-7803-5947-X
  • Type

    conf

  • DOI
    10.1109/LEOS.2000.893946
  • Filename
    893946