Title :
A novel silicon electro-optic device for sensor applications
Author :
LeMinh, P. ; Akil, N. ; Walling, H. ; Woerlee, P.H. ; van den Berg, A. ; Holleman, Jeremy
Author_Institution :
MESA Res. Inst., Twente Univ., Enschede, Netherlands
Abstract :
Though R. Newman reported the avalanche breakdown light emission in a conventional p-n junction diode half a century ago, there are almost no successful applications of this phenomenon in industry. We report the realization of a novel silicon electro-optic device, explicitly the integration of light emitting diode antifuse and photodetector on a single silicon wafer by CMOS technology, and the first important results. The diode antifuse (called antifuse to the rest of this contribution) resembles a conventional diode but has a small size of a few tens of nanometers, which permits easy collection of all emitted photons
Keywords :
avalanche breakdown; electro-optical devices; elemental semiconductors; integrated optics; light emitting diodes; optical fabrication; optical sensors; photodetectors; silicon; CMOS technology; Si; Si electro-optic device; avalanche breakdown light emission; conventional diode; conventional p-n junction diode; diode antifuse; emitted photons; industry; light emitting diode antifuse; photodetector; sensor applications; single Si wafer; Detectors; Electrooptic devices; Microwave integrated circuits; Optoelectronic and photonic sensors; Petroleum; Resists; Silicon; Standards development; Transistors; Voltage;
Conference_Titel :
Lasers and Electro-Optics Society 2000 Annual Meeting. LEOS 2000. 13th Annual Meeting. IEEE
Conference_Location :
Rio Grande
Print_ISBN :
0-7803-5947-X
DOI :
10.1109/LEOS.2000.893946