Title :
Design and Numerical Stress Analysis of Silicon Membrane Hibachi Windows
Author :
Jun, Chang H. ; Gentile, Charles ; Priniski, Craig ; Sethian, John
Author_Institution :
Princeton Plasma Phys. Lab., NJ
Abstract :
A silicon membrane windows is developed for a KrF laser system. The main function of the windows is to pass electron beam into the laser cell and to hold pressurized gas in the cell. 150 micro-meter thick silicon windows successfully survived from heated electron beam bombardment and shows 80% of electron beam transmission rate. The single silicon windows endured 250,000 cycles of electron beam shots. The arrayed windows did not show sufficient performance due to excessive heat generation. To enhance the longevity, the cooling system has to be improved and a study of the arc generated by the cathode is necessary
Keywords :
cathodes; electron beam pumping; elemental semiconductors; excimer lasers; krypton compounds; laser accessories; membranes; optical materials; optical windows; silicon; 150 mm; KrF; KrF laser system; Si; arcs; arrayed windows; cathode; cooling system; electron beam shots; electron beam transmission rate; heat generation; heated electron beam bombardment; laser cell; numerical stress analysis; pressurized gas; silicon membrane Hibachi windows; Biomembranes; Cathodes; Conducting materials; Electron beams; Gas lasers; Laboratories; Laser fusion; Optical materials; Silicon; Stress; Corrosion by gas; Diamond coating; Electron beam; KrF laser; Silicon Window; Transmission rate;
Conference_Titel :
Fusion Engineering 2005, Twenty-First IEEE/NPS Symposium on
Conference_Location :
Knoxville, TN
Print_ISBN :
0-4244-0150-X
Electronic_ISBN :
0-4244-0150-X
DOI :
10.1109/FUSION.2005.252867
