Title :
Evaluation of planar microlens for optical interconnects
Author :
Aoki, Y. ; Shimada, Y. ; Iga, K.
Author_Institution :
Microsyst. Res. Center, Tokyo Inst. of Technol., Yokohama, Japan
Abstract :
We evaluated an effective numerical aperture (NA) of a planar microlens for optical interconnects. With 125 μm aperture mask, effective NA of single planar microlens (PML) was 0.07 and that of stacked PML was 0.17. In this study, we estimated the design parameter for a PML based optical interconnect system
Keywords :
integrated optics; masks; microlenses; optical design techniques; optical interconnections; 125 mum; PML based optical interconnect system; aperture mask; design parameter; effective numerical aperture; planar microlens optical interconnects; single planar microlens; stacked PML; Apertures; Chromium; Focusing; Glass; Lenses; Microoptics; Optical arrays; Optical design; Optical diffraction; Optical interconnections;
Conference_Titel :
Lasers and Electro-Optics Society 2000 Annual Meeting. LEOS 2000. 13th Annual Meeting. IEEE
Conference_Location :
Rio Grande
Print_ISBN :
0-7803-5947-X
DOI :
10.1109/LEOS.2000.893969
