DocumentCode
2758960
Title
Evaluation of planar microlens for optical interconnects
Author
Aoki, Y. ; Shimada, Y. ; Iga, K.
Author_Institution
Microsyst. Res. Center, Tokyo Inst. of Technol., Yokohama, Japan
Volume
2
fYear
2000
fDate
2000
Firstpage
569
Abstract
We evaluated an effective numerical aperture (NA) of a planar microlens for optical interconnects. With 125 μm aperture mask, effective NA of single planar microlens (PML) was 0.07 and that of stacked PML was 0.17. In this study, we estimated the design parameter for a PML based optical interconnect system
Keywords
integrated optics; masks; microlenses; optical design techniques; optical interconnections; 125 mum; PML based optical interconnect system; aperture mask; design parameter; effective numerical aperture; planar microlens optical interconnects; single planar microlens; stacked PML; Apertures; Chromium; Focusing; Glass; Lenses; Microoptics; Optical arrays; Optical design; Optical diffraction; Optical interconnections;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Society 2000 Annual Meeting. LEOS 2000. 13th Annual Meeting. IEEE
Conference_Location
Rio Grande
ISSN
1092-8081
Print_ISBN
0-7803-5947-X
Type
conf
DOI
10.1109/LEOS.2000.893969
Filename
893969
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