DocumentCode
2760513
Title
Low loss laser-written channel waveguides in porous silicon
Author
Rossi, A.M. ; Perrone, G. ; Cappelluti, F. ; Camarchia, V. ; Boarino, Luca ; Amato, G.
Author_Institution
Ist. Elettrotecnico Nazionale Galileo Ferraris, Torino, Italy
Volume
2
fYear
2000
fDate
2000
Firstpage
762
Abstract
In this paper we present the fabrication and characterization of low loss buried channel waveguides in porous silicon (PS), designed to work around 1.55 μm, and obtained for the first time by direct laser writing. This novel technique, derived from the laser ablation, is a good alternative to the traditional photolithographic process. In fact, owing to the low thermal conductivity of PS, the high temperatures required for the writing are achievable with low power lasers, making the process highly efficient and possible with the standard equipment present in most laboratories
Keywords
elemental semiconductors; laser ablation; optical fabrication; optical losses; optical waveguides; porous semiconductors; silicon; 1.55 micron; Si; buried channel waveguide; direct laser writing; fabrication; laser ablation; optical loss; porous silicon; Laboratories; Laser ablation; Optical design; Optical device fabrication; Power lasers; Silicon; Temperature; Thermal conductivity; Waveguide lasers; Writing;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Society 2000 Annual Meeting. LEOS 2000. 13th Annual Meeting. IEEE
Conference_Location
Rio Grande
ISSN
1092-8081
Print_ISBN
0-7803-5947-X
Type
conf
DOI
10.1109/LEOS.2000.894077
Filename
894077
Link To Document