• DocumentCode
    2760513
  • Title

    Low loss laser-written channel waveguides in porous silicon

  • Author

    Rossi, A.M. ; Perrone, G. ; Cappelluti, F. ; Camarchia, V. ; Boarino, Luca ; Amato, G.

  • Author_Institution
    Ist. Elettrotecnico Nazionale Galileo Ferraris, Torino, Italy
  • Volume
    2
  • fYear
    2000
  • fDate
    2000
  • Firstpage
    762
  • Abstract
    In this paper we present the fabrication and characterization of low loss buried channel waveguides in porous silicon (PS), designed to work around 1.55 μm, and obtained for the first time by direct laser writing. This novel technique, derived from the laser ablation, is a good alternative to the traditional photolithographic process. In fact, owing to the low thermal conductivity of PS, the high temperatures required for the writing are achievable with low power lasers, making the process highly efficient and possible with the standard equipment present in most laboratories
  • Keywords
    elemental semiconductors; laser ablation; optical fabrication; optical losses; optical waveguides; porous semiconductors; silicon; 1.55 micron; Si; buried channel waveguide; direct laser writing; fabrication; laser ablation; optical loss; porous silicon; Laboratories; Laser ablation; Optical design; Optical device fabrication; Power lasers; Silicon; Temperature; Thermal conductivity; Waveguide lasers; Writing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Society 2000 Annual Meeting. LEOS 2000. 13th Annual Meeting. IEEE
  • Conference_Location
    Rio Grande
  • ISSN
    1092-8081
  • Print_ISBN
    0-7803-5947-X
  • Type

    conf

  • DOI
    10.1109/LEOS.2000.894077
  • Filename
    894077