Fabrication of Highly Ordered Cylindrical Nanopores with Modulated Diameter Using Anodic Alumina

Author

Bodepudi, Srikrishna Chanakya ; Bachman, Daniel ; Pramanik, Sandipan

Author_Institution

Dept. of Electr. & Comput. Eng., Univ. of Alberta, Edmonton, AB, Canada

fYear

2011

fDate

8-10 Dec. 2011

Firstpage

1

Lastpage

4

Abstract

We propose two novel methods for fabrication of highly ordered cylindrical nanopores with modulated diameter using anodic aluminum oxide (AAO) template. These are (a) multistep anodization in which each step is separated from the next by a controlled wet etching process, and (b) lateral hard anodization of aluminum in malonic acid. This latter method also circumvents the typical sample burning problem which always accompanies surface hard anodization. Further, this method enables high temperature, high voltage anodization studies without requiring a buffer layer of aluminum oxide on the surface.

Keywords

alumina; anodisation; electrolytic polishing; etching; nanofabrication; nanoporous materials; Al₂O₃; anodic alumina; burning problem; cylindrical nanopore; high voltage anodization; modulated diameter; multistep anodization; surface hard anodization; wet etching process; Aluminum oxide; Current density; Fabrication; Heating; Modulation; Surface treatment;

fLanguage

English

Publisher

ieee

Conference_Titel

Nanoscience, Technology and Societal Implications (NSTSI), 2011 International Conference on

Conference_Location

Bhubaneswar

Print_ISBN

978-1-4577-2035-2

Type

conf

DOI

10.1109/NSTSI.2011.6111796

Filename

6111796