DocumentCode

2761432

Title

Near Surface Region Of Modified Saw Substrates As A Component Of Layered Structure

Author

Kapelewski, Jerzy ; Dukata, Andrzej

fYear

1993

fDate

9-11 Jun 1993

Firstpage

250

Lastpage

250

Keywords

Adhesives; Fabrication; Frequency; Impurities; Physics; Stress; Surface acoustic waves; Surface topography; Surface treatment; Surface waves;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronic Manufacturing Technology Symposium, 1993., Proceedings of 1993 Japan International

Print_ISBN

0-7803-1432-8

Type

conf

DOI

10.1109/IEMT.1993.639762

Filename

639762