DocumentCode :
2761837
Title :
Multi-layer graphene wire grown by annealing sputtered amorphous carbon
Author :
Sato, Motonobu ; Takahashi, Makoto ; Nakano, Haruhisa ; Murakami, Tomo ; Kawabata, Akio ; Nihei, Mizuhisa ; Yokoyama, Naoki
Author_Institution :
Collaborative Res. Team Green Nanoelectron. Center (GNC), Nat. Inst. of Adv. Ind. Sci. & Technol. (AIST), Tsukuba, Japan
fYear :
2012
fDate :
4-6 June 2012
Firstpage :
1
Lastpage :
3
Abstract :
We have fabricated multi-layer graphene directly on SiO2 by annealing sputtered amorphous carbon with a Co catalyst without use of complicated transfer processes. Structural analysis revealed that the graphene sheets formed an epitaxial structure, aligned to the Co (111) surface. An MLG wire can sustain a high current density of 107 A/cm2 which is over one order of magnitude higher than that of a Cu wire.
Keywords :
annealing; catalysts; current density; graphene; silicon compounds; sputter deposition; wires (electric); C-SiO2; Co; MLG wire; catalyst; complicated transfer process; current density; epitaxial structure; graphene sheet; multilayer graphene wire; sputtered annealing; structural analysis; Annealing; Carbon; Conductivity; Current density; Films; Silicon; Wires;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Interconnect Technology Conference (IITC), 2012 IEEE International
Conference_Location :
San Jose, CA
ISSN :
pending
Print_ISBN :
978-1-4673-1138-0
Electronic_ISBN :
pending
Type :
conf
DOI :
10.1109/IITC.2012.6251671
Filename :
6251671
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2761837
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