• DocumentCode
    2761837
  • Title

    Multi-layer graphene wire grown by annealing sputtered amorphous carbon

  • Author

    Sato, Motonobu ; Takahashi, Makoto ; Nakano, Haruhisa ; Murakami, Tomo ; Kawabata, Akio ; Nihei, Mizuhisa ; Yokoyama, Naoki

  • Author_Institution
    Collaborative Res. Team Green Nanoelectron. Center (GNC), Nat. Inst. of Adv. Ind. Sci. & Technol. (AIST), Tsukuba, Japan
  • fYear
    2012
  • fDate
    4-6 June 2012
  • Firstpage
    1
  • Lastpage
    3
  • Abstract
    We have fabricated multi-layer graphene directly on SiO2 by annealing sputtered amorphous carbon with a Co catalyst without use of complicated transfer processes. Structural analysis revealed that the graphene sheets formed an epitaxial structure, aligned to the Co (111) surface. An MLG wire can sustain a high current density of 107 A/cm2 which is over one order of magnitude higher than that of a Cu wire.
  • Keywords
    annealing; catalysts; current density; graphene; silicon compounds; sputter deposition; wires (electric); C-SiO2; Co; MLG wire; catalyst; complicated transfer process; current density; epitaxial structure; graphene sheet; multilayer graphene wire; sputtered annealing; structural analysis; Annealing; Carbon; Conductivity; Current density; Films; Silicon; Wires;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Interconnect Technology Conference (IITC), 2012 IEEE International
  • Conference_Location
    San Jose, CA
  • ISSN
    pending
  • Print_ISBN
    978-1-4673-1138-0
  • Electronic_ISBN
    pending
  • Type

    conf

  • DOI
    10.1109/IITC.2012.6251671
  • Filename
    6251671
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2761837