DocumentCode
2761842
Title
Surface micrometrology using ultrasound
Author
Blessing, G.V. ; Eitzen, D.G. ; Ryan, H.M. ; Slotwinski, J.A.
Author_Institution
Nat. Inst. of Stand. & Technol., Gaithersburg, MD, USA
fYear
1990
fDate
4-7 Dec 1990
Firstpage
1047
Abstract
The development of ultrasonic scattering and reflection techniques for the online measurement of machined part surface features is described. A range of ultrasonic frequencies and beam dimensions was supplied to shaped and turned sample surfaces, using both scattering and profiling techniques. It is demonstrated that it is feasible for pulsed ultrasound to resolve average roughness values and discrete asperities of less than 1 μm
Keywords
surface topography measurement; ultrasonic materials testing; average roughness values; beam dimensions; discrete asperities; machined part surface features; online measurement; profiling techniques; pulsed ultrasound; shaped sample surfaces; surface micrometrology; turned sample surfaces; ultrasonic frequencies; ultrasonic reflection techniques; ultrasonic scattering; Frequency; Manufacturing; Monitoring; Optical reflection; Pulse measurements; Rough surfaces; Scattering; Surface roughness; Surface topography; Ultrasonic imaging;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium, 1990. Proceedings., IEEE 1990
Conference_Location
Honolulu, HI
Type
conf
DOI
10.1109/ULTSYM.1990.171522
Filename
171522
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