DocumentCode :
2762301
Title :
Fail Bit Analysis System For Semiconductor Memory Wafers
Author :
Ishikawa, Seiji ; Ishihara, Koichi ; Miyamot, Y. ; Miyazki, I. ; Ohshikk, T. ; Sato, Masayuki
fYear :
1993
fDate :
9-11 Jun 1993
Firstpage :
287
Lastpage :
290
Keywords :
Circuits; Data analysis; Displays; Failure analysis; Laboratories; Production engineering; Scanning electron microscopy; Semiconductor device manufacture; Semiconductor memory; Testing;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electronic Manufacturing Technology Symposium, 1993., Proceedings of 1993 Japan International
Print_ISBN :
0-7803-1432-8
Type :
conf
DOI :
10.1109/IEMT.1993.639772
Filename :
639772
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2762301
