Compact, high-displacement piezoelectric actuator with potential micromechanical applications

Author

Robbins, William P. ; Polla, Dennis L. ; Glumac, Daniel E.

Author_Institution

Dept. of Electr. Eng., Minnesota Univ., Minneapolis, MN, USA

fYear

1990

fDate

4-7 Dec 1990

Firstpage

1191

Abstract

An actuator was developed that, in a macroscale version, is composed of a number of parallel bars of lead zirconate titanate (PZT) connected together in a meander line configuration so that they are mechanically in series and electrically in parallel. The polarity of the adjacent bars is arranged so that if a given bar expands under the applied voltage, the adjacent bars contract. Experimental measurements are in agreement with the predictions of an electromechanical model of the actuator. The design and fabrication of a micromechanical version of the actuator is also described

Keywords

electric actuators; micromechanical devices; piezoelectric devices; PZT bars; PbZrO3TiO3; compact actuator; electromechanical model; high-displacement piezoelectric actuator; macroscale version; meander line configuration; micromechanical applications; parallel bars; polarity; Bars; Capacitive sensors; Geometry; Micromechanical devices; Piezoelectric actuators; Piezoelectric devices; Robust stability; Scanning electron microscopy; Titanium compounds; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 1990. Proceedings., IEEE 1990

Conference_Location

Honolulu, HI

Type

conf

DOI

10.1109/ULTSYM.1990.171550

Filename

171550