Title :
Optical Properties, Elasto-Optical Effects, and Critical-Point Parameters of Biaxially Stressed Si1-yCy Alloys on Si
Author :
Zollner, S. ; Vartanian, V. ; Liu, J. Ping ; Zaumseil, P. ; Osten, H. Jorg ; Demkov, A.A. ; Bich-Yen Nguyen
Author_Institution :
Freescale Semicond. Inc., Austin, TX
Abstract :
The optical properties (complex dielectric function) and critical-point parameters for Si1-yCy alloys with high substitutional C content grown pseudomorphically on Si (001) were determined. These data are useful for process control (if such alloys are used in CMOS processing), for example using spectroscopic ellipsometry to determine film thickness, modulation spectroscopy (especially photoreflectance) to determine composition and strain, for the correction of UV Raman spectroscopy data, or for the assessment of film quality by identifying intrinsic alloy disorder in perfect samples
Keywords :
critical points; ellipsometry; interface structure; optical properties; piezo-optical effects; silicon; silicon compounds; surface composition; wide band gap semiconductors; SiC-Si; UV Raman spectroscopy; critical-point parameters; elasto-optical effects; film composition; film quality; film strain; film thickness; intrinsic alloy disorder; modulation spectroscopy; optical properties; process control; spectroscopic ellipsometry; Capacitive sensors; Dielectrics; Ellipsometry; Lattices; Optical distortion; Optical films; Optical scattering; Photonic band gap; Silicon alloys; Spectroscopy;
Conference_Titel :
SiGe Technology and Device Meeting, 2006. ISTDM 2006. Third International
Conference_Location :
Princeton, NJ
Print_ISBN :
1-4244-0461-4
DOI :
10.1109/ISTDM.2006.246604
