Laser power monitoring using MEMS micromirror technology

Author

Agarwal, Abhishek ; Arney, S. ; Barber, B.P. ; Kosinski, S.G. ; LeGrange, J.D. ; Raju, V.R. ; Ruel, R.

Author_Institution

AT&T Bell Labs., Murray Hill, NJ, USA

fYear

1999

fDate

1999

Firstpage

198

Lastpage

201

Abstract

We have fabricated and characterized fiberized MEMS in situ power monitor chips in which a surface-micromachined out-of-plane micromirror partially reflects the incident multimode light to an on-chip fiber tap. Reflectivity and transmittivity were measured as a function of time at various increasing incident optical power levels, and for various material systems. The first prototypes show stability to hundreds of milliwatts

Keywords

laser variables measurement; light transmission; micro-optics; micromachining; microsensors; mirrors; monitoring; optical fibre couplers; power measurement; reflectivity; MEMS micromirror technology; fiberized MEMS in situ power monitor chips; incident multimode light; incident optical power levels; laser power monitoring; material systems; on-chip fiber tap; partial light reflection; reflectivity; stability; surface-micromachined out-of-plane micromirror; transmittivity; Fiber lasers; Micromechanical devices; Micromirrors; Monitoring; Optical materials; Power lasers; Power measurement; Reflectivity; Semiconductor device measurement; Time measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Reliability Physics Symposium Proceedings, 1999. 37th Annual. 1999 IEEE International

Conference_Location

San Diego, CA

Print_ISBN

0-7803-5220-3

Type

conf

DOI

10.1109/RELPHY.1999.761612

Filename

761612