Title :
Reliability methodology for prediction of micromachined accelerometer stiction
Author :
Hartzell, Allyson ; Woodilla, David
Author_Institution :
Div. of Micromachined Products, Analog Devices Inc., Cambridge, MA, USA
Abstract :
The accurate prediction of known failure mechanisms is required for success in the integrated circuit marketplace. This study reports an empirically-generated stiction field prediction model methodology for accelerometers prone to stiction failure. A probability distribution function was generated as a function of shock level in g´s. Although the population was all very stiction prone, the failure mode is probabilistic and parts have a high survival rate
Keywords :
accelerometers; microsensors; probability; semiconductor device models; semiconductor device reliability; stiction; accelerometers; empirically-generated stiction field prediction model methodology; failure mechanisms; integrated circuit marketplace; micromachined accelerometer stiction; part survival rate; probabilistic failure mode; probability distribution function; reliability methodology; shock level; stiction failure; stiction prediction; stiction prone population; Acceleration; Accelerometers; Capacitive sensors; Electric shock; Failure analysis; Integrated circuit reliability; Mechanical sensors; Mechanical systems; Microscopy; Predictive models;
Conference_Titel :
Reliability Physics Symposium Proceedings, 1999. 37th Annual. 1999 IEEE International
Conference_Location :
San Diego, CA
Print_ISBN :
0-7803-5220-3
DOI :
10.1109/RELPHY.1999.761613
