Title :
Mechano-optical switching in a MEMS integrated photonic crystal slab waveguide
Author :
Abdulla, S.M.C. ; Kauppinen, L.J. ; Dijkstra, M. ; Berenschot, E. ; de Boer, M.J. ; de Ridder, R.M. ; Krijnen, G.J.M.
Author_Institution :
Transducers Sci. & Technol. Group, Univ. of Twente, Enschede, Netherlands
Abstract :
A photonic crystal slab waveguide (PhC-WG) with an integrated MEMS bimorph cantilever actuator has been successfully fabricated using deep UV lithography and surface micromaching techniques. The cantilever is equipped with tips that are self-aligned with respect to the holes of the PhC-WG such that on electrostatic actuation, with modest voltages of less than 10 V, these tips move into the holes. This provides electro-opto-mechanical modulation of light-transmission, up to 80%, for interaction lengths as short as 10 μm. The device is monolithically integrated and designed to operate in the C-band of the telecommunication wavelengths.
Keywords :
cantilevers; electro-optical modulation; electrostatic actuators; integrated optics; light transmission; micro-optomechanical devices; micromachining; optical design techniques; optical fabrication; optical switches; optical waveguides; photonic crystals; ultraviolet lithography; deep UV lithography; electro-optomechanical modulation; electrostatic actuation; integrated MEMS bimorph cantilever actuator; light transmission; mechano-optical switching; monolithically integrated device; photonic crystal slab waveguide; surface micromaching; telecommunication wavelengths; Atmospheric measurements; Fabrication; Measurement by laser beam; Optical switches; Optical waveguides; Photonic crystals; Silicon;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
Conference_Location :
Cancun
Print_ISBN :
978-1-4244-9632-7
DOI :
10.1109/MEMSYS.2011.5734349
