A 2.8-MM imaging probe based on a high-fill-factor MEMS mirror and wire-bonding-free packaging for endoscopic optical coherence tomography

Author

Wu, L. ; Samuelson, S.R. ; Sun, J. ; Lau, W. ; Choe, S. ; Sorg, B.S. ; Jia, K. ; Xie, H.

Author_Institution

WiOptix Inc., Gainesville, FL, USA

fYear

2011

fDate

23-27 Jan. 2011

Firstpage

33

Lastpage

36

Abstract

This paper reports a miniature optical coherence tomography (OCT) probe and high-resolution 3D OCT imaging results obtained with this probe. The probe is only 2.8-mm in diameter, enabled by a unique high-fill-factor electrothermal MEMS mirror with hidden actuators and a novel wire-bonding-free (WBF) packaging technique. The MEMS mirror has a large mirror aperture of 1 mm with a chip size of only 1.55 × 1.7 × 0.5 mm³. The fabricated device achieves large 2-D scan optical angles up to 46° at only 4.8 V. High-resolution 3D OCT imaging results are also demonstrated using this assembled probe.

Keywords

bioMEMS; biomedical optical imaging; endoscopes; microactuators; micromirrors; optical tomography; packaging; OCT; endoscopic optical coherence tomography; hidden actuators; high-fill-factor electrothermal MEMS mirror; high-resolution 3D OCT imaging; imaging probe; miniature probe; size 1 mm to 2.8 mm; wire-bonding-free packaging; Actuators; Imaging; Micromechanical devices; Mirrors; Optical beams; Probes; Tumors;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on

Conference_Location

Cancun

ISSN

1084-6999

Print_ISBN

978-1-4244-9632-7

Type

conf

DOI

10.1109/MEMSYS.2011.5734355

Filename

5734355