• DocumentCode
    2765634
  • Title

    Direct physical exfoliation and transfer of graphene grown via ethanol chemical vapor deposition

  • Author

    Kwanghyun Yoo ; Takei, Y. ; Bo Hou ; Chiashi, Shohei ; Maruyama, Shoichi ; Matsumoto, Kaname ; Shimoyama, Isao

  • Author_Institution
    Dept. of Mechano-Inf., Univ. of Tokyo, Tokyo, Japan
  • fYear
    2011
  • fDate
    23-27 Jan. 2011
  • Firstpage
    99
  • Lastpage
    102
  • Abstract
    A standard exfoliation process of graphene involves several problems associated with damage of graphene and long-time consumption. Here we demonstrate a direct physical exfoliation and transfer processes of graphene grown via ethanol-chemical vapor deposition (CVD). Our exfoliation process exploits a polydimethylsiloxane (PDMS) stamp for conformal contact with graphene. Moreover, it rapidly exfoliates a few-layer graphene (FLG) film with high quality from entire graphene layers on Ni within 5 min. Indeed, the process time is significantly faster than few hours for a standard process. Even after exfoliation, our graphene shows high quality which is verified by the high intensity ratio of G band to D band (IG / ID > 20) in Raman spectra. IG / ID of our graphene is approximately five times higher than that of standard graphene (IG / ID <; 4) that implies low defects in our graphene. The technology for exfoliating a FLG film can be used for highly desired layer-by-layer manipulation of graphene because it is still difficult to synthesize appropriate layers of graphene on an arbitrary substrate. Through the graphene transfer process, we integrate the exfoliated graphene film to a silicon dioxide (SiO2) surface with low damage for various N/MEMS applications. Also, by employing ethanol vapor (i.e., cheap and stable) as a source of carbon for graphene synthesis, we improve a conventional synthesis process of graphene using methane gas (i.e., expensive and explosive).
  • Keywords
    Raman spectra; chemical vapour deposition; graphene; thin films; C; MEMS application; NEMS application; Raman spectra; SiO2; direct physical exfoliation; ethanol chemical vapor deposition; ethanol vapor; few-layer graphene film; graphene transfer process; layer-by-layer manipulation; methane gas; polydimethylsiloxane stamp; silicon dioxide surface; Carbon; Chemicals; Ethanol; Films; Nickel; Optical surface waves; Surface treatment;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
  • Conference_Location
    Cancun
  • ISSN
    1084-6999
  • Print_ISBN
    978-1-4244-9632-7
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2011.5734371
  • Filename
    5734371