Direct immobilization of enzymes on common photoresists

We demonstrate the use of common photoresists for the direct immobilization of enzymes on micropatterns. Absorbance spectrometry and fluorescence imaging confirmed successful attachment of glucose oxidase on both positive and negative resists commonly used in the microfabrication of MEMS. For SU8, the immobilization may be, at least partially, caused by covalent binding of the enzyme to the substrate mediated by amine groups. Since no pre-treatment of the substrate is needed for the attachment, the proposed method allows for a facile and very versatile approach for the integration of enzymatic functionality into novel MEMS devices.