DocumentCode :
2766309
Title :
Fabrication and characterization of high current field emitters with silicon ball-tip pins
Author :
Kim, Baek Hyun ; Kwon, Jae Wan ; Baxter, Emily A. ; Kovaleski, Scott D.
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Missouri, Columbia, MO, USA
fYear :
2011
fDate :
23-27 Jan. 2011
Firstpage :
249
Lastpage :
252
Abstract :
This paper introduces a novel design of high current field emitters based on unique pin structures with a ball shaped tip. Our ball-tip pins provide relatively large surface area at the tip and increase the field enhancement factor regardless of dimension of the pin base. The ball-tip pins turn out to produce higher field emission current than that from the generic sharp-tip pins due to the significantly increased field emission sites at the ball-tip surface.
Keywords :
electron field emission; elemental semiconductors; etching; silicon; Si; ball-tip pin; field enhancement factor; generic sharp-tip pin; high current field emitter; Electric fields; Electron emission; Etching; Fabrication; Metals; Pins; Silicon;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
Conference_Location :
Cancun
ISSN :
1084-6999
Print_ISBN :
978-1-4244-9632-7
Type :
conf
DOI :
10.1109/MEMSYS.2011.5734408
Filename :
5734408
Link To Document :
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