DocumentCode
2766326
Title
Fabrication and properties of 3D flexible parylene-based microelectrode array with silicon tips
Author
Wang, Renxin ; Zhao, Wei ; Wang, Wei ; Li, Zhihong
Author_Institution
Nat. Key Lab. of Sci. & Technol. on Micro/Nano Fabrication, Peking Univ., Beijing, China
fYear
2011
fDate
23-27 Jan. 2011
Firstpage
253
Lastpage
256
Abstract
We have developed and characterized a novel 3D flexible parylene-based microelectrode array (MEA) with silicon tips, which combines advantages of the rigid 3d electrode and the flexible substrate. The impedance of solid 3D MEA in PBS solution is smaller than that of the planar and hollow 3D MEA. Further tests indicate that the solid 3D MEA has better penetrating performance, and retains previous structure and profile without observable damage after penetration.
Keywords
biomedical electronics; elemental semiconductors; microelectrodes; prosthetics; silicon; substrates; 3D MEA; 3D flexible parylene-based microelectrode array; PBS solution; flexible substrate; silicon tips; Arrays; Electrodes; Fabrication; Silicon; Solids; Substrates; Three dimensional displays;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
Conference_Location
Cancun
ISSN
1084-6999
Print_ISBN
978-1-4244-9632-7
Type
conf
DOI
10.1109/MEMSYS.2011.5734409
Filename
5734409
Link To Document