Doubly-Supported Beam Actuators for MEMS-based Tunable Fabry-Perot Etalons

Author

Milne, Jason ; Mittal, Amit ; Dell, John ; Keating, Adrian ; Faraone, Lorenzo

Author_Institution

Univ. of Western Australia, Perth

fYear

2006

fDate

6-8 Dec. 2006

Firstpage

220

Lastpage

223

Abstract

Through development of analytic formulae and finite element modeling, a MEMS-based Fabry-Perot etalon that uses doubly-supported beams for actuation is shown to have a wider tuning range than conventional designs using parallel plate actuators. The boundary conditions of the doubly-supported beam are shown to have a significant effect on the tuning characteristics, and a simple method of controlling the tuning range using the boundary conditions without the need for precise control over material stress is presented.

Keywords

actuators; finite element analysis; interferometers; micromechanical devices; tuning; MEMS-based tunable Fabry-Perot etalons; boundary conditions; doubly-supported beam actuators; finite element modeling; material stress; parallel plate actuators; Actuators; Boundary conditions; Electrodes; Fabry-Perot; Finite element methods; Infrared detectors; Microelectronics; Mirrors; Optical filters; Stress control; Electrostatic Actuation; Microelectromechanical systems (MEMS); Spectroscopy;

fLanguage

English

Publisher

ieee

Conference_Titel

Optoelectronic and Microelectronic Materials and Devices, 2006 Conference on

Conference_Location

Perth, WA

Print_ISBN

978-1-4244-0578-7

Electronic_ISBN

978-1-4244-0578-7

Type

conf

DOI

10.1109/COMMAD.2006.4429920

Filename

4429920