DocumentCode :
2767163
Title :
Electrostatic oscillation of CNT bundles
Author :
Wang, Pengbo ; Yan, Xiaojun ; Jiang, Yingqi ; Li, Wei ; Lin, Liwei
Author_Institution :
Mech. Eng. Dept., Univ. of California at Berkeley, Berkeley, CA, USA
fYear :
2011
fDate :
23-27 Jan. 2011
Firstpage :
420
Lastpage :
423
Abstract :
Electrostatic oscillations of conductive CNT bundles have been successfully demonstrated in air environment. Three unique characteristics have been observed and characterized. First, CNT bundles have been constructed by a simple “pick, stick and break” process using a regular probe tip from vertically aligned CNT forest on a silicon substrate. Second, CNT bundles have been actuated statically under applied DC voltages. Third, CNT bundles oscillated following the applied AC input frequencies. As such, this research present electrostatic oscillation of CNT bundles and could potentially open up a new class of actuator/oscillator research for applications in the general field of MEMS and NEMS.
Keywords :
carbon nanotubes; electrostatic actuators; elemental semiconductors; micromechanical devices; nanoelectromechanical devices; silicon; C; MEMS; NEMS; Si; carbon nanotubes; conductive CNT bundles; electrostatic oscillation; regular probe tip; silicon substrate; Carbon nanotubes; Electrodes; Electrostatics; Force; Oscillators; Probes; Vibrations;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
Conference_Location :
Cancun
ISSN :
1084-6999
Print_ISBN :
978-1-4244-9632-7
Type :
conf
DOI :
10.1109/MEMSYS.2011.5734451
Filename :
5734451
Link To Document :
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