Fe-B-Nb-Nd Magnetic metallic glass thin film for MEMS/NEMS structure

Author

Phan, T.A. ; Lee, S.M. ; Makino, A. ; Oguchi, H. ; Kuwano, H.

Author_Institution

Grad. Sch. of Eng., Tohoku Univ., Sendai, Japan

fYear

2011

fDate

23-27 Jan. 2011

Firstpage

428

Lastpage

431

Abstract

This paper presents characteristics of Fe-B-Nb-Nd magnetic metallic glass thin film (MGTF) which is greatly desired for MEMS/NEMS devices. The advantages of the Fe-B-Nb-Nd MGTF include high robustness and soft magnetic property. In our study, we have measured the film characteristics such as structure, surface morphology, hardness, elastic modulus, internal stress, and soft magnetic property. We also report a fabrication process of freestanding micro-cantilevers using this Fe-B-Nb-Nd MGTF for a vibration based micro energy harvester by micromachining techniques.

Keywords

boron; elastic moduli; energy harvesting; hardness; internal stresses; iron; magnetic thin films; metallic glasses; microfabrication; neodymium; niobium; soft magnetic materials; surface morphology; MEMS/NEMS structure; elastic modulus; freestanding micro-cantilevers; hardness; high robustness; internal stress; magnetic metallic glass thin film; micro energy harvester; micromachining techniques; soft magnetic property; surface morphology; Acceleration; Glass; Internal stresses; Micromechanical devices; Silicon; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on

Conference_Location

Cancun

ISSN

1084-6999

Print_ISBN

978-1-4244-9632-7

Type

conf

DOI

10.1109/MEMSYS.2011.5734453

Filename

5734453