Title :
Fe-B-Nb-Nd Magnetic metallic glass thin film for MEMS/NEMS structure
Author :
Phan, T.A. ; Lee, S.M. ; Makino, A. ; Oguchi, H. ; Kuwano, H.
Author_Institution :
Grad. Sch. of Eng., Tohoku Univ., Sendai, Japan
Abstract :
This paper presents characteristics of Fe-B-Nb-Nd magnetic metallic glass thin film (MGTF) which is greatly desired for MEMS/NEMS devices. The advantages of the Fe-B-Nb-Nd MGTF include high robustness and soft magnetic property. In our study, we have measured the film characteristics such as structure, surface morphology, hardness, elastic modulus, internal stress, and soft magnetic property. We also report a fabrication process of freestanding micro-cantilevers using this Fe-B-Nb-Nd MGTF for a vibration based micro energy harvester by micromachining techniques.
Keywords :
boron; elastic moduli; energy harvesting; hardness; internal stresses; iron; magnetic thin films; metallic glasses; microfabrication; neodymium; niobium; soft magnetic materials; surface morphology; MEMS/NEMS structure; elastic modulus; freestanding micro-cantilevers; hardness; high robustness; internal stress; magnetic metallic glass thin film; micro energy harvester; micromachining techniques; soft magnetic property; surface morphology; Acceleration; Glass; Internal stresses; Micromechanical devices; Silicon; Substrates;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on
Conference_Location :
Cancun
Print_ISBN :
978-1-4244-9632-7
DOI :
10.1109/MEMSYS.2011.5734453
