Title :
MPCVD Processing of Titanium-diffused LiNbO3 Waveguides: Optical Characterisation and Waveguide Restoration
Author :
Trpkovski, S. ; Bui, Lam A. ; Gibson, B.C. ; Huntington, S.T. ; Simpson, D. ; Ampem-Lassen, E. ; Rabeau, J.R. ; Mitchell, A.
Author_Institution :
Univ. of Melbourne, Melbourne
Abstract :
This paper presents some initial findings that explore the material properties of LiNbO3 which has been exposed to a microwave plasma-enhanced chemical vapor deposition (MPCVD) environment. The LiNbO3 was found to undergo a process known as ´reduction´ when exposed to this environment. A technique was developed to reverse this process and recover the LiNbO3, which is a crucial first step towards the integration of diamond-based single photon sources with LiNbO3 waveguide technologies.
Keywords :
diamond; lithium compounds; optical fabrication; optical waveguides; plasma CVD; titanium; LiNbO3; MPCVD processing; diamond-based single photon sources; microwave plasma-enhanced chemical vapor deposition; optical characterisation; titanium-diffused waveguides; waveguide restoration; waveguide technologies; High speed optical techniques; Integrated optics; Optical attenuators; Optical losses; Optical polarization; Optical refraction; Optical variables control; Optical waveguides; Physics; Quantum computing; LiNbO3; MPCVD; diamond; optical; waveguide;
Conference_Titel :
Optoelectronic and Microelectronic Materials and Devices, 2006 Conference on
Conference_Location :
Perth, WA
Print_ISBN :
978-1-4244-0578-7
Electronic_ISBN :
978-1-4244-0578-7
DOI :
10.1109/COMMAD.2006.4429929
